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Photodefinable Spin-on Silicones Overview

Dow Corning® WL-5000 Series Photodefinable Spin-on Silicones are colorless, transparent, photodefinable spin-on films developed for microelectronics applications.

Dow Corning WL-5000 series products are processed in six steps utilizing commercially available equipment and industry standard processes:

1. Spin coat
2. Soft bake
3. UV exposure
4. Post-exposure bake
5. Development
6. Hard bake

Ancillary products are available for edge bead removal, rinse, development and rework (stripping).

Description
Colorless, transparent solution of silicone-based material in mesitylene for spin-coating and photolithographic processing.

Potential Uses
Front and backside wafer protective layer; stress-buffer layer applications; redistribution layer; soldermask; negative photoresist; adhesive layer; sacrificial layer

Application Methods
Spin-coating and photolithographic processing at I-line or broadband using industry-standard equipment and processing conditions

	Dow Corning® Brand Product		Features
	WL-5150 Photopatternable Spin-On Silicone		Low stress; medium modulus; low-temperature thermal cure; high thermal stability; low shrinkage; good moisture resistance; good dielectric properties; films of 15 to 40 µm in thickness; negative tone patternable to an aspect ratio less than 1.3 with sloping sidewalls; demonstrated device integration; easily reworkable
	WL-5351 Photopatternable Spin-On Silicone		Low stress; higher modulus; low-temperature thermal cure; high thermal stability; low shrinkage; good moisture resistance; good dielectric properties; films of 6 to 18 µm in thickness; negative tone patternable to an aspect ratio less than 1.3 with sloping sidewalls; demonstrated device integration; easily reworkable

Technical Data

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